Technical Data

Basic Sensor Architecture

a = 4,32 mm          b = 5,08 mm
c = 0,76 mm          d = 3,12 mm
e = 0,50 mm          f = 0,50 mm

Type 1 :                                      
 
h = 0,75 mm ..... 1,50 mm
m = 100 m .....  650 m

Type 2 :                                     
h = 1,35 mm ..... 1,50 mm
m =    20 m  .....  650 m  
Type 1:
The Membrane is on connection side. Total sensor
thickness varies, depending on measurement range
due to the membrane thickness which ranges from
100 m  to 650 m.
Type 2:
The membrane is etched in the base wafer, 
therefore the total sensor height is independent
of the measurement range or the thickness of 
the membrane.

 

Circuit Diagram  -  Chip Connections  -   Definitions

 

 Characteristic Curve
The diagram shows the
 relation between the 
load (pressure or force)
 in % FS*
 and the sensor output Capacitance Cx 

FS :  (Full Scale)

 

 

Temperature drift of the zero point related
to the initial capacitance  "Cxo" *

Force - sensors

Order-No.

force
range

Temperature drift (ppm/C)

min.

typical

max.

K5cN

0 - 0,05 N

0

200

500

K30cN

0 - 0,30 N

0

100

300

K90cN

0 - 0,90 N

0

100

300

K3N

0 - 3,0 N

0

50

100

K15N-30N

0 - 30 N

0

50

100

K100N

0 - 100 N

0

50

100

K1000N

0 - 1000 N

0

50

100

K1500N

0 - 1500 N

0

50

100


Pressure - sensors

Order - No.

Pressure
Range

Temperature drift (ppm/C)

min.

typical

max.

D500m

0 - 500 mbar

0

300

500

D2500m

0 - 2,5 bar

0

200

300

D8

0 - 8 bar

0

100

200

D40

0 - 40 bar

0

50

100

D200

0 - 200 bar

0

10

50

D500

0 - 500 bar

0

10

50

D1500

0 - 1500 bar

0

10

50

operational temperature range for sensors : up to  +350C, max.
below zero  C  by order.

 

Sensors drawing list

Pressure-Sensors

Force-Sensors

Order-No.

Drawing-No.

Thickness 
inch (mm)

Order-No.

Drawing-No.

Thickness with stainless-steel-plate 

D500m

2

0.055 in
(1.4 mm)

K5cN

4 or 6

0,18 - 2,2 in
(4,5 - 5mm) *

D2500m

2

0,055 in
(1,4 mm)

K30cN

4 or 6

0,18 - 2,2 in
(4,5 -5 mm) *

D8

2

0,055 in
(1,4 mm)

K3N

4 or 6

0,18 - 2.2 in
(4,5 -5 mm) *

D40

2

0,055 in
(1,4 mm)

K15N

4 or 6

0,18 - 2,2 in
(4,5 -5 mm) *

D200

2

0,055 in
(1,4 mm)

K50N

3 , 4 , 5  or 6 

0,18 - 2,2 in
(4,5 -5 mm)

D500

1 or 2

0.055 in
(1,4 mm)

K100N

3 , 4 , 5 or 6

0,2 in
(5,0 mm)

D1500

1 or 2

0,055 in
(1,4 mm)

K1500N

(1, 2) or 7

0,26 in
(6,5 mm)

* optional: SS base plate thicknesses less then 0,18 inch (4.5 mm) available upon request

 

Sensor  drawings